參考的標準
SEMI C69 — Test Method for the Determination of Surface Areas of Polymer Pellets
SEMI C90 — Test Methods and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems
SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies
SEMI F40 — Practice For Preparing Liquid Chemical Distribution Components for Chemical Testing
SEMI F61 — Guide to Design and Operation of a Semiconductor Ultrapure Water Systems
SEMI F63 — Guide for Ultrapure Water used in Semiconductor Processing
ASTM D4327 — Anions in Water by Chemically Suppressed Ion Chromatography
ASTM D4779 — Total, Organic, and Inorganic Carbon in High Purity Water by Ultraviolet (UV) or Persulfate Oxidation, or Both, and Infrared Detection
ASTM D5904 — Standard Test Method of Total Carbon, Inorganic Carbon, and Organic Carbon in Water by UV, Persulfate Oxidation and Membrane Conductivity Detection
ISO 4287 — Geometrical Product Specifications (GPS) – Surface Texture: Profile Method – Terms, Definitions and Surface Texture Parameters
SEMASPEC 92010936B-STD — Provisional Test Method for Determining Leachable Trace Inorganics in Ultra Pure Water Distribution System Components
三：半導體"超凈高純"的離子析出
-------上海勁孚化工 021--57629631-------
半導體濕電子化學品離子析出
